Overview of SiC/Silicon Carbide/Alumina Porous Ceramic Chucks for Wafer Processing Semiconductors

SiC/Silicon Carbide/Alumina Porous Ceramic Chucks for Wafer Processing Semiconductors is manufactured from high-purity aluminum oxide (Al₂O₃, 95%-99.8%), offering exceptional mechanical strength and thermal stability. These components are precision-engineered to meet strict tolerances, ensuring reliable performance in demanding environments. With a maximum operating temperature of 1800°C, they are widely used across industries including semiconductor, automotive, chemical processing, and medical equipment. Available in various shapes (rods, tubes, plates, washers) and surface finishes to suit specific application requirements.

Key Features of SiC/Silicon Carbide/Alumina Porous Ceramic Chucks for Wafer Processing Semiconductors

Extreme Temperature Resistance – Withstands continuous operation up to 1800°C

Superior Mechanical Properties – High hardness (Mohs 9) and compressive strength

Excellent Wear & Corrosion Resistance – Outlasts metals in abrasive environments

Electrical Insulation – High dielectric strength for electronic applications

Chemical Inertness – Resistant to acids, alkalis and molten metals

Precision Manufacturing – Tight tolerances (±0.01mm) for critical applications

(SiC/Silicon Carbide/Alumina Porous Ceramic Chucks for Wafer Processing Semiconductors)

Specification of SiC/Silicon Carbide/Alumina Porous Ceramic Chucks for Wafer Processing Semiconductors

These permeable ceramic chucks hold semiconductor wafers snugly during handling. They utilize vacuum suction with tiny openings. The product is key. SiC (silicon carbide) and alumina (light weight aluminum oxide) are both used. They are very hard. They withstand chemicals well. They handle high warm easily. This is essential in wafer fabs.

The permeable structure is unique. It permits air to stream with for vacuum gripping. But the surface area remains flat and smooth. Wafers don’t obtain scratched. The holes are extremely little and even. This provides a strong, dependable hold. No shifting occurs. This accuracy is important for precise etching or deposition.

These chucks handle heat efficiently. They warm up or cool off quickly. The warmth spreads equally across the surface. This maintains the wafer at a stable temperature level. Uniform temperature is essential. It quits wafer bending. It ensures regular process results. SiC chucks conduct warmth much better than alumina. Alumina offers great electric insulation. The selection depends on the details procedure action.

Sturdiness matters. SiC and alumina are difficult. They resist put on from consistent use. They handle thermal cycling well. Going from hot to chilly repetitively doesn’t fracture them. This indicates less downtime for substitutes. They last longer.

Chemical resistance is one more large plus. Wafer handling utilizes extreme acids and solvents. These chucks do not wear away. They stay steady. Performance doesn’t deteriorate gradually. Cleaning is uncomplicated. Deposits don’t stick easily.

They function dependably at heats. Several procedures run hot, usually 150-200 ° C or more. These chucks maintain their stamina and flatness. Vacuum suction stays solid. There’s no outgassing to contaminate the wafer. They give a stable, tidy system for vital production steps.

(SiC/Silicon Carbide/Alumina Porous Ceramic Chucks for Wafer Processing Semiconductors)

Applications of SiC/Silicon Carbide/Alumina Porous Ceramic Chucks for Wafer Processing Semiconductors

SiC permeable ceramic chucks are important for making semiconductor wafers. These chucks hold wafers securely during numerous steps. The trick is their permeable structure. Tiny holes run through the ceramic product. A vacuum cleaner pulls air with these openings. This suction holds the wafer securely in place. There is no demand for clamps or various other mechanical parts. This prevents harming the wafer sides.

The chuck material itself matters a great deal. Silicon Carbide is very hard and hard. It stands up to wear from consistent handling. It additionally handles heats conveniently. Procedures like chemical vapor deposition get really hot. SiC chucks remain stable. Alumina ceramic chucks are another option. They are likewise permeable and good for vacuum holding. Alumina provides high pureness and chemical resistance. Both SiC and alumina chucks maintain the wafer tidy. They release really couple of bits. Contamination damages wafers. These chucks avoid that.

These chucks are used anywhere in wafer fabs. Lithography makers need best wafer flatness. Porous chucks give that level, stable hold. Etching devices utilize them. Chemical etchants can not damage the chuck surface area. Thin film deposition tools depend on them. The chucks endure the heat and gases. Wafer inspection and width steps utilize them too. The wafer must not move in any way during exact measurements. Vacuum holding ensures zero slippage. The porosity additionally helps with electrostatic discharge. Cost can dissipate through the chuck material. This safeguards sensitive devices on the wafer.

The outcome is dependable wafer handling. Manufacturing facilities obtain greater returns. Fewer wafers break or obtain polluted. The chucks last a long period of time even with hefty use. This saves cash on substitutes and downtime.

Company Profile

Alumina Technology Co., Ltd,. We focus on the research and development, production and sales of alumina products, serving the electronics, ceramics, chemical and other industries. Since its establishment in 2005, the company has been committed to providing customers with the best products and services, and has become a leader in the industry through continuous technological innovation and strict quality management.

Our products includes but not limited to Alumina Boat, Alumina Crucible, Alumina Dish, Alumina Foam Filter, Alumina Plate, Alumina Rod, Alumina Bar, Alumina Balls, Filter Alumina, Nano Alumina Powder, Spherical Alumina Powder, ect. please feel free to contact us.(nanotrun@yahoo.com)

Payment Methods

T/T, Western Union, Paypal, Credit Card etc.

Shipment Methods

By air, by sea, by express, as customers request.

5 FAQs of SiC/Silicon Carbide/Alumina Porous Ceramic Chucks for Wafer Processing Semiconductors

(SiC/Silicon Carbide/Alumina Porous Ceramic Chucks for Wafer Processing Semiconductors)